Bowden recorded his 338th career victory, tying Paterno for the most among Division I-A coaches. Penn State is off this weekend.
Beitia kicked field goals of 34, 38, 47 and 39 yards for the Seminoles (6-1).
But the Seminoles were kept out of the end zone after Chris Rix's 79-yard touchdown pass to Craphonso Ellis just 3:19 into the contest.
Rix completed 12-of-25 passes for 189 yards while Greg Jones rushed for 96 yards on carries.
The Cavaliers (4-3) closed to 16-14 on Matt Schaub's pass to tight end Heath Miller in the third.
Schaub completed 39-of-53 passes for 326 yards and two TDs, but the Cavaliers were held to minus-five yards rushing.