The former Diocese of Joliet priest, Alejandro Flores, does not plan to appeal his deportation, authorities said.
Flores was taken into custody by immigration officials.
He is in the process of being removed from the priesthood after a Vatican review. He was recruited by the Joliet Diocese to come to Chicago nine years ago, the Chicago Tribune reported.
"We have zero say over [his deportation], and certainly wouldn't help [him]," said Edward Flavin, a diocese spokesman. "We're totally against him. He is restricted from any sort of public ministry."
Flores attempted to commit suicide after it was revealed he molested a St. Charles boy over a five-year period beginning in 2005. He pleaded guilty to the charges in September 2010 and served part of a four-year prison sentence.
In exchange for his guilty plea, prosecutors dropped allegations he also attempted to abuse another minor from the same family, the Tribune said.