Demjanjuk is accused of being an accessory to 29,000 homicides as a guard at the Sobibor death camp in 1943, CNN reported. The news network said Demjanjuk, 88, will be deported Sunday.
After he arrives in Germany Monday officials plan to question him before bringing charges against him.
Nazi hunter Efraim Zuroff of the Simon Wiesenthal Center told CNN he was "thrilled" Demjanjuk will be deported.
Demjanjuk has been fighting war crime charges for more than 20 years. In 1986, after being extradited from the United States to Israel, he was convicted of war crimes, but the conviction was overturned on appeal and Demjanjuk was returned to the United States.
Demjanjuk is originally from Ukraine.
In 1998, the U.S. government filed new charges against him, alleging he had been a concentration camp guard. He has been stripped of his U.S. citizenship and has been awaiting deportation since 2005.
Demjanjuk has argued that he had been captured by German forces and held as a prisoner of war.