Vaz completed14-of-33 passes for 267 yards, including a 49-yard scoring strike to Brandin Cooks. He was intercepted once.
Markus Wheaton caught two of Vaz's touchdown passes, finishing with four catches for 108 yards.
Terron Ward rushed for 146 yards on 19 carries, including a 53-yard TD run for the Beavers (7-1, 5-1 Pac-12).
The Sun Devils' Taylor Kelly finished 22-for-41 with 153 yards, one touchdown and an interception. Cameron Marshall ran for one score for Arizona State (5-4, 3-3), which has lost three straight.