Ferrer, the tournament defending champion and No. 1 seed, was on the court 61 minutes and won 62 of the 101 points in the match. Ferrer was good on 60 percent of his first serves and won 83 percent -- 25-of-30 -- of the points when his first serve was in.
Benneteau had four break chances but Ferrer foiled them all and cashed in four of his own five opportunities.
Seeded players went 3-for-4 Thursday, with Jeremy Chardy taking out fourth-seeded John Isner to spoil the sweep. Chardy had 17 aces -- along with nine double faults -- and won three-quarters of the points on serve.
No. 3-seeded Nicolas Almagro topped Michal Przysiezny 6-4, 7-5 and fifth-seeded Jerzy Janowicz was a 6-2, 7-5 winner over Joao Sousa in the other matches involving seeded players.
Ferrer goes against Janowicz and Almagro meets seventh-seeded Fabio Fognini in quarterfinals Friday. Nieminen plays Youzhny and Chardy faces Dmitry Tursunov in the other quarterfinals.