The 52-year-old Perry used his third consecutive round in the low 60s to finish at 19-under 261, overtaking third-round leader Fred Couples.
Perry, who lost to Angel Cabrera in a playoff at the 2009 Masters, posted his third overall triumph on the seniors circuit.
Couples, the 2011 Senior Players Championship winner, carded a 2-under 68, ending at 17-under-par 263.
He claimed second place along with Duffy Waldorf (64) at Fox Chapel Golf Club.
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