Haas, the favorite to win the $1.1 million tournament, will take on Juan Monaco of Argentina in Sunday's title match.
The No. 4 seed Cilic of Croatia gave Haas a battle in the first set before Haas dominated the second en route to a 7-6 (9-7), 6-0 win.
Monaco needed three sets to get past top-seeded Nicolas Almagro 3-6, 6-3, 6-4 Saturday.
Monaco holds a 3-1 career record against Haas, but Haas already has an ATP championship under his belt this year.