Philadelphia took a 2-1 lead in the opening-round series and the Bulls' already desperate injury situation turned worse when center Joakim Noah suffered a sprained ankle during the second half. Noah's status for Game 4 Sunday was uncertain.
Chicago is already without last year's regular-season MVP Derrick Rose for the remainder of the playoffs due to a torn knee ligament.
The Bulls owned an 11-point lead early in the fourth quarter and still were in front by seven after Carlos Boozer made a layup with 5:08 to play. Chicago managed only three points the rest of the way, those coming on a shot from beyond the arc with 45 seconds remaining that briefly brought the Bulls within a point.
Philadelphia took the lead for good at 72-71 on the jumper by Hawes and the 76ers outscored the Bulls in the fourth quarter 28-14.
Hawes led Philadelphia with 21 points, Jrue Holiday added 17 and Evan Turner 16.
Boozer produced 18 points and grabbed 10 rebounds for the Bulls.