Speedy wide receiver Darrius Heyward-Bey had 11 catches for 101 yards and scored a first-quarter touchdown on a 10-yard pass from running back Da'Rel Scott.
Placekicker Obi Egekeze booted four field goals and the defense limited Wake Forest to 219 total yards for the inconsistent Terps (5-2, 2-1 ACC), who bounced back from an embarrassing 31-0 loss at Virginia Oct. 4 with their third win over a ranked opponent this season.
The setback against the Cavaliers was their first shutout loss in four years.
Scott finished with 73 yards on 18 carries.
Wake Forest quarterback Riley Skinner completed 14-of-30 passes for 127 yards.
Running back Josh Adams gained just 41 yards on 13 carries, and D.J. Boldin caught seven passes for 72 yards for the Demon Deacons (4-2, 2-1), whose defense recovered two of three Maryland fumbles.