The second round contest was played in San Diego.
Brandon Roy had a game-high 21 points, seven rebounds and three assists; Justin Dentmon had 13 points, six rebounds and four assists; and Jamaal Williams added 10 points, seven rebounds and three blocked shots for the 5th-seeded Huskies (26-6), who advanced to the Sweet 16 for the second straight year.
James Augustine had 19 points and nine rebounds; fellow senior Dee Brown had 15 points and six assists; and Rich McBride added 13 points, four rebounds and three assists for the 4th-seeded Fighting Illini, who ended the season with a 26-7 mark.
Illinois, which was denied a third straight trip to the Sweet 16, had a slim 34-32 edge in rebounding.
Astronomers offer more expansive view of universe
Duggar sisters unveil Christian dating rules in new book