Phoebe Alexiades told the Los Angeles Times her mother died Saturday at a hospice in Santa Barbara.
Canfield's TV career also included roles on "Bewitched," "General Hospital," "The Love Boat" and "The Andy Griffith Show."
Her big-screen roles included playing a maid in "Pollyanna" and a teacher in "Something Wicked This Way Comes."
She also appeared on stage in both Broadway and off-Broadway productions.
Susan Sarandon 'very excited' about daughter's pregnancy
Teacher apologizes for showing sexual image of herself in class