The couple, who will celebrate their four-year wedding anniversary Monday, flew into France Friday for the ceremony later that night.
"Tonight was an incredible night," Carey Tweeted. "I can't express how amazing it was to renew our vows in Paris at the top of the Eiffel Tower."
Carey wore a white mermaid dress with spaghetti straps and a black bow, and Cannon was in a white suit with a black tie, the magazine reported.
Following the renewal ceremony, the parents of 1-year-old twins were spotted having dinner at Le Jules Verne restaurant at the Eiffel Tower.
Celebrity Couples of 2014 [PHOTOS]